生津教授のレビュー論文 Wiley Top Downloaded Articleに！【工学部】

English

本学工学部の生津資大教授がIEEJ Transactions on Electrical and Electronic Engineeringに投稿したレビュー論文「Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review」がWiley Top Downloaded Articleに選ばれました。

この論文はIC等の半導体デバイスやMEMS（Micro Electro Mechanical Systemsの略）に使われるマイクロ～ナノサイズの材料の機械物性計測手法と代表的な機械物性、そして物性のサイズ効果をまとめたレビュー論文です。生津教授はこの分野で長きにわたり独自の力学実験手法を開発し、シリコン系材料や金属薄膜、ポリマー膜等の多種多様な材料のマイクロ～ナノサイズでの機械物性を実測することで、マイクロ～ナノサイズであるからこそ生じる現象を明らかにしてきました。マイクロサイズの材料特性はICやMEMSの安全設計に不可欠であり、また，実測が難しいナノ材料の機械物性は未知なものが多く、多くの大学の研究者や半導体産業の技術者が大きな関心を寄せました。

ぜひ、ご一読ください！

（工学部教授 川上浩司）

Professor Namazu’s review paper has been selected as Wiley Top Downloaded Article!

Professor Takahiro Namazu’s review paper “Mechanical Property Measurement of Micro/Nanoscale Materials for MEMS: A Review” submitted to IEEJ Transactions on Electrical and Electronic Engineering has been selected as a Wiley Top Downloaded Article.

This paper summarizes mechanical property measurement techniques developed so far, typical mechanical properties of various types of materials, and those size effects on mechanical properties of micro- to nano-sized materials used in semiconductor devices such as ICs and MEMS (Micro Electro Mechanical Systems). Professor Namazu has been developing unique mechanical experiment equipment and techniques in this field for many years. By measuring the mechanical properties of a wide variety of materials such as silicon-based materials, metal thin films, and polymer films at the micro-to-nano size, he has clarified physical phenomena that occur in the micro/nano size. Micro-sized material properties are essential for the safe design of ICs and MEMS. Many of the mechanical properties of nanomaterials, which are difficult to accurately measure, are still unknown. Many researchers and engineers have been very interested in the article. Please have a read here!

(Hiroshi Kawakami, Faculty of Engineering)

関連リンク

生津資大先生の教員紹介はこちら